[DOWNLOAD] "Handbook of Silicon Based MEMS Materials and Technologies" by Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Motooka & Veikko Lindroos ~ Book PDF Kindle ePub Free
eBook details
- Title: Handbook of Silicon Based MEMS Materials and Technologies
- Author : Markku Tilli, Mervi Paulasto-Kröckel, Matthias Petzold, Horst Theuss, Teruaki Motooka & Veikko Lindroos
- Release Date : January 17, 2020
- Genre: Engineering,Books,Professional & Technical,
- Pages : * pages
- Size : 109648 KB
Description
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures.
The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students.
Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structuresReviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvementsGeared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
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